This course takes you on a tour inside the cleanroom facility and explains the basic idea behind each of the micro/nano fabrication techniques. It is an introductory course that demonstrates the basic idea behind each technique along with its pros and cons without going through the mathematical details. However, this course provides a very comprehensive view of these processes with separate modules for:
Patterning techniques
Oxidation
Etching
Deposition techniques
Doping
Metallization
Process integration & simulations
Moreover, some design practical aspects are also considered. So, it draws a comprehensive picture for the techniques used in most fields within the scope of Nanotechnology